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| Your Position: Facilities -> Research FacilitiesFacilities |
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 Hybrid FCVA Deposition System |
Model：P600
Person in Charge：Dr. Peiling KE
Tel：+86-574-86685036
Main Parameters：
△Plasma source: Filtering vacuum arc, metal arc, HIPIMS sputtering, DC sputtering
△Base pressure：<1.0×10-5Torr
△Chamber size：Φ600×600mm
△Substrate turntable：6 axels with revolution and rotation (Speed :0～10rpm)
△Substrate bias：DC bipolar pulse( ~350KHZ, ~600V), RF (13.56MHz, 2.5KW)
Applications：
This system is specially designed to deposit the functional nano-structured coatings with high
performance like ta-C, CrN, TiN, TiAlN, metal alloy thin films etc. on the various substrates.
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| Hybrid Ion Beam Film Deposition System |
Model: P600
Person in Charge:Dr. Lili Sun
Tel：+86-574-86685165
Main Parameters:
△Plasma source:linear and end-hall ion beam, magnetron sputtering, PECVD
△Base Pressure：<1.0×10-5Torr
△Chamber size：Φ600×600mm
△Substrate bias：DC bipolar pulse( ~350KHZ, ~600V),RF (13.56MHz, 2.5KW),
Applications:
The system can be used to deposit various functional coatings (such as super-hard, anti-corrosion,
wear resistant, self-lubricant, oxidation resistant etc.), various decorative coatings (black, red, blue,
gold etc. ), and the surface modification of plasma treatment. The substrates include metal, alloy,
polymer, ceramic, fiber and so on.
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| Protecting Atmosphere Furnace |
Model：SFJ-261
Manufacturer：WAN YI SCI&TECH,Hefei
Person in Charge：Rende Chen
Tel：+86-574-86685035
Main Parameters：
△Minimum leakage rate：5×10-12Pa·m3/s
△Leakage display range：1×10-3～1×10-12Pa·m3/s
△start time：≤5min
△response time：＜1 sec
△Maximum detect pressure：300Pa
△Maximum pressure：5×10-4Pa
△Size：550(W)×500(D)×280(H)
Applications：
Measurement of vacuum leakage for the various vacuum systems.
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